<p>[PROBLEMS] To provide a device for performing operation continuously while preventing occurrence of trouble in safety and quality even when the grating on the bottom of the upper layer work space region of a clean room is opened. [MEANS FOR SOLVING PROBLEMS] A dummy grating being fixed to the bottom of the upper layer work space region of a clean room closes an opening formed by opening the grating constituting the bottom of the upper layer work space region. The dummy grating has a hole formed in its side face part, and a hole lid for opening/closing that hole is provided.</p>
申请公布号
WO2009050808(A1)
申请公布日期
2009.04.23
申请号
WO2007JP70339
申请日期
2007.10.18
申请人
TOKYO ELECTRON LIMITED;OH, KWANG-SEOK;SO, JIN-HYUK