发明名称 DUMMY GRATING OF CLEAN ROOM
摘要 <p>[PROBLEMS] To provide a device for performing operation continuously while preventing occurrence of trouble in safety and quality even when the grating on the bottom of the upper layer work space region of a clean room is opened. [MEANS FOR SOLVING PROBLEMS] A dummy grating being fixed to the bottom of the upper layer work space region of a clean room closes an opening formed by opening the grating constituting the bottom of the upper layer work space region. The dummy grating has a hole formed in its side face part, and a hole lid for opening/closing that hole is provided.</p>
申请公布号 WO2009050808(A1) 申请公布日期 2009.04.23
申请号 WO2007JP70339 申请日期 2007.10.18
申请人 TOKYO ELECTRON LIMITED;OH, KWANG-SEOK;SO, JIN-HYUK 发明人 OH, KWANG-SEOK;SO, JIN-HYUK
分类号 F24F7/06 主分类号 F24F7/06
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