| 摘要 |
PURPOSE:To increase motion temperature of an element through stabilization of a characteristic of a resistance heating substance, by a method wherein a resistance heating substance for use with a gas detecting element, in which a metallic oxide film resistor serves as a sensing substance, is aged by holding it at a specified temperature range for a given time or more in prior to a detecting motion. CONSTITUTION:Glass powder is added to powder of a metallic oxide, and after the mixture is printed on a ceramic insulating plate 1, a burning or other treatment takes place to form a heater 2. After electrodes 3 and 3' are printed at the opposite ends of the heater 2 and are burned, lead wires are connected thereto. A metallic oxide film such as SnO2 is adhered to other surface of the plate 1 by a reactive spattering method to form a gas sensing film 5, and electrode terminals 4 and 4' such as gold are formed. The heater 1 for use with the gas detecting element is energized and is held at a range of 350-600 deg.C for 15hr or more to age it. This causes the temperature of the heater 2 to be stably held at a range of 350-250 deg.C to increase the motion temperature of the element, which results in maintaining sensitivity and responseness in a stable manner. As a result, high-precise gas detection takes place. |
