发明名称 SUPPLY SYSTEM OF SLURRY
摘要 PURPOSE: An automatic slurry supplying system is provided to uniformly supply the slurry for a long time by preventing the sediment of chemical. CONSTITUTION: A pair of suction tube and exhausting tube for sucking and exhausting the slurry are installed at the first and second drums(10,10'). A multi-nozzle having a plurality of suction ports and exhausting ports is connected to the first and second drums(10,10'). Outer ends of the suction tube and exhausting tube are connected to a suction side and an exhausting side of a tubing pump(32). The first and the third valves are installed at the suction tube and exhausting tube of the first drum(10) for controlling the suction and exhaustion of the slurry. The second and fourth valves are installed at the suction tube and exhausting tube of the second drum(10') for controlling the suction and exhaustion of the slurry.
申请公布号 KR100258443(B1) 申请公布日期 2000.06.01
申请号 KR19970065975 申请日期 1997.12.04
申请人 DNS KOREA CO.,LTD. 发明人 PARK, YOUNG KIL;ROH, MYOUNG SEOB;HAN, KI CHANG;CHOI, CHEUL KYU
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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