VERFAHREN ZUR DICHTIGKEITSPRÜFUNG GALVANISCHER ELEMENTE

摘要

The measurement system consists of a closed chamber (4) which may be pressurized or evacuated. It has a pressure gauge (6) and a distance measurement sensor (7) aimed toward one or more electronic modules with thin foil housings (5). When the chamber is evacuated to 500 mbar absolute pressure, the thin foils may bulge and this movement may be measured. Valves (3) connect the chamber alternately to an air pump (1), giving a pressure of 1-10 bar absolute and to a vacuum pump (2).