RESONATOR ELEMENT, RESONATOR, RESONATOR DEVICE, OSCILLATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A resonator element includes a quartz crystal substrate in which a plane including X and Z′ axes is set as a main plane and a direction oriented along Y′ axis is a thickness direction. The quartz crystal substrate includes a first region that includes a side along the X axis and a side along the Z′ axis, a second region that has a thickness thinner than the first region. When Mx is a length of the first region along the X axis, Mz is a length of the first region along the Z′ axis, Z is a length of the quartz crystal substrate along the Z′ axis, and lz is a length of the second region along the Z′ axis interposed between the first region and an outer frame of the quartz crystal substrate, relations of 0.9

主权项

1. A resonator element comprising:
a quartz crystal substrate in which an X axis of an orthogonal coordinate system having the X axis serving as an electric axis, a Y axis serving as a mechanical axis, and a Z axis serving as an optical axis, which are crystallographic axes of quartz crystal, is set as a rotation axis, an axis inclined from the Z axis so that a +Z side is rotated in a −Y direction of the Y axis is set as a Z′ axis, an axis inclined from the Y axis so that a +Y side is rotated in a +Z direction of the Z axis is set as a Y′ axis, a plane including the X and Z′ axes is set as a main plane, and the direction oriented along the Y′ axis is set as a thickness direction, wherein the quartz crystal substrate includes
a first region that includes a side formed along the X axis and a side formed along the Z′ axis, anda second region that is located in periphery of the first region and has a thickness thinner than the first region, and wherein when Mx is a length of the first region along the X axis, Mz is a length of the first region along the Z′ axis, Z is a length of the quartz crystal substrate along the Z′ axis, and lz is a length of the second region along the Z′ axis interposed between the first region and an outer frame of the quartz crystal substrate in a plan view, relations of 0.9