| 摘要 |
PURPOSE:To reduce voltage applied between a secondary main electrode and a rear electrode by chamfering an edge of a side which is in contact with a dielectric of an opening provided in a secondary main electrode and adhering it closely to the dielectric to form a triple junction and by forming a wedge gap in laser gas. CONSTITUTION:After a secondary main electrode 3 is chamfered at an edge of a side in contact to a dielectric 4 of an opening 7, it is adhered to the dielectric 4 and a triple junction is formed with the surface of the dielectric 4 and the opening 7 of the main electrode 3, then a wedge gap is formed in laser gas. If voltage is applied between the main electrode 3 and a rear electrode 5 from a high voltage pulse source 1, a large electric field is applied to the laser gas near the wedge gap thus developing intense creeping discharge. Main discharge is produced by discharge and electron which is generated through creeping discharge of glowing and uniform discharge, and the number of electrons can be increased which are produced by photoionization by ultraviolet light. In this way, enough preliminary ionization can be made even if the applied voltage of the high voltage pulse source 1 is low. |
