发明名称 PRUEFUNG VON PHOTODIODEN MIT ELEKTRONENSTRAHLEN.
摘要 Method and apparatus for testing photodiode arrays using an electron beam. The diodes are charged at successive intervals over the RC time constant curve to develop successively increasing voltages at the ends of succeeding time intervals. Diode voltage and current are measured at the end of each interval and the resulting data are used to develop a current-voltage characteristic for each diode.
申请公布号 DE3775359(D1) 申请公布日期 1992.01.30
申请号 DE19873775359 申请日期 1987.04.27
申请人 SANTA BARBARA RES CENTER 发明人 BURGETT B;JOYCE J;KASAI ICHIRO;OSGOOD L;WARFIELD D
分类号 G01R31/26;G01R31/265;G01R31/28;G01R31/302;G01R31/305;H01L21/66;H01L31/10;(IPC1-7):G01R31/26 主分类号 G01R31/26
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