摘要 |
PROBLEM TO BE SOLVED: To provide a membrane inlet mass spectrometer capable of extending application over a wide range and of improving measurement efficiency and precision. SOLUTION: The membrane inlet mass spectrometer D, having a sample inlet section 2 with selectively transmissive membranes 5, 6 provided on the upstream side of an analyzer section 3 comprises temperature control means 5a, 6a provided surrounding the membranes 5, 6.
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