| 摘要 |
Fluid in- and out-flow spaces (4, 5) are provided for fluid inlet and outlet (16a, 16b) of a fluid processor (3) accommodated in housing (1). Further, pair wall means (6, 11) defining the fluid in- and out-flow spaces, a flexible member (6) provided for deformation on at least one of the wall means, an operation chamber (8) provided in correspondence to the flexible member, fluid pressure supply means for fluid pressure for reciprocating the flexible member and port on-off means for reverse flow prevention to direct flow of fluid from the fluid in-flow space to the fluid out-flow space are provided. Reciprocal operation of the flexible member generates fluid pressure variation in the fluid in-and out-flow spaces, thus causing flow of said fluid processor. |
