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发明名称
VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON POLYKRISTALLINEM SILICIUM.
摘要
申请公布号
DE3586412(D1)
申请公布日期
1992.09.03
申请号
DE19853586412
申请日期
1985.10.22
申请人
ISHIZUKA, HIROSHI, TOKIO/TOKYO, JP
发明人
ISHIZUKA, HIROSHI, TOKIO/TOKYO, JP
分类号
C01B33/02;C01B33/035;C23C16/24;(IPC1-7):C01B33/02
主分类号
C01B33/02
代理机构
代理人
主权项
地址
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