| 摘要 |
The invention relates to a projection system for guiding light with wavelengths <=193 nm from an object plane to an image plane, comprising at least a first mirror (M1), a second mirror (M2), a third mirror (M3), a fourth mirror (M4), a fifth mirror (M5) and a sixth mirror (M6) centered around an optical axis and being arranged along the optical axis, with the light traveling from the object plane to the first mirror, then from the first mirror (M1) to the second mirror (M2), then from the second mirror (M2) to the third mirror (M3), then from the third mirror (M3), the fourth mirror (M4), then from the fourth mirror to the fifth mirror (M5) and then from the fifth mirror (M5) to the sixth mirror (M6), The invention is characterized in that the first mirror (M1) is arranged along the optical axis (HA) geometrically between the fifth mirror (M5) and the sixth mirror (M6), and the third mirror (M3) is a convex mirror.
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