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发明名称
OBJECT CARRYING MECHANISM
摘要
申请公布号
JPH06329297(A)
申请公布日期
1994.11.29
申请号
JP19930117325
申请日期
1993.05.19
申请人
MAKOO KK
发明人
MATSUBARA TORU
分类号
B65G15/42;B65H5/08;H01L21/50;H01L21/677;H01L21/68;(IPC1-7):B65H5/08
主分类号
B65G15/42
代理机构
代理人
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地址
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