| 摘要 |
<p>A process for producing a ceramic member having fine throughholes, includes forming, in a first green sheet, which is to form a thin ceramic plate (7), a plurality of fine throughholes (1) so that the hole-to-hole distance after sintering becomes 70 mu m or less. A window (3) is formed in a second green sheet which is to be a ceramic substrate (9) and the first and second green sheets are laminated so that the throughholes (1) correspond to the one window (3). The laminate is sintered to produce a unitarily sintered material as a ceramic member having fine throughholes. The holes (3) may be formed after the lamination of the green sheets. The ceramic member having fine throughholes, produced by the above process satisfies the requirements of high density, high precision and increased reliability for such devices as an encoder, a high-precision fine field shutter, an ion current-controlling head, a scale and the like.</p> |
