| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle having bond strength, no optical deterioration, a long life and high performance by using a specific perfluoropolyether compound or a composition made of the perfluoropolyether compound and a sensitizer for the main component of an adhesive. SOLUTION: A perfluoropolyether compound E expressed by a formula or a composition made of the perfluoropolyether compound E and a sensitizer is used for the main component of a pellicle adhesive sticking a pellicle membrane and a pellicle frame, where Rf is the perfluoroalkyl group having carbon atoms of 1-30 or the perfluorooxy alkyl group, and A is a bivalent organic group and may have bonding containing hetero atom in it. R<1> is a monovalent hydrocharbon group having carbon atoms of 1-8, (m) is a positive integer of 0-2, (n) is a positive integer of 1-3, (m+n) is 3 or below, and X is a hydrolytic group, thereby a pellicle having a long life and high performance can be manufactured.</p> |
