发明名称 |
MICROMECHANICAL PRECISION SILICON SCALE |
摘要 |
The invention concerns a silicon micromechanical weight sensor (26). According to the invention, the weight sensor comprises at least two conducting electrodes (2, 15) displaced at a distance from each other, whereby one of the elastically suspended electrode surfaces (2) or, alternatively, a structure connected thereto, acts as the pan surface of the weight sensor.
|
申请公布号 |
WO9967605(A1) |
申请公布日期 |
1999.12.29 |
申请号 |
WO1999FI00538 |
申请日期 |
1999.06.18 |
申请人 |
VALTION TEKNILLINEN TUTKIMUSKESKUS;SILLANPAEAE, TEUVO;OJA, AARNE;SEPPAE, HEIKKI |
发明人 |
OJA, AARNE;SEPPAE, HEIKKI |
分类号 |
G01G3/12;G01G7/06;(IPC1-7):G01G3/12 |
主分类号 |
G01G3/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|