| 摘要 |
PROBLEM TO BE SOLVED: To provide a high corrosion resistant member with film, having <=10 μm film thickness and capable of withstanding a salt spray test over a period of 96 hr, and the film. SOLUTION: The member with laminated film consists of a base material, a first-layer film, and a second-layer film. The first-layer film is a film formed by means of cathode arc, which is formed on the surface of the base material and has a composition consisting of one or more kinds selected from the group consisting of Ti, TiAl, Zr, Hf, V, Nb, Ta, Cr, and nitrides thereof and also has 1-9 μm film thickness. The second-layer film is a film formed under vacuum, which is formed on the first-layer film and has a composition consisting of Al2O3 or MgO and 1-9 μm film thickness. Moreover, the thickness of the laminated film consisting of the first-layer film and the second-layer film is regulated to <=10 μm. Further, the laminated film consists of the first-layer film and the second-layer film both constituting the above member. |
