METHOD AND SYSTEM FOR MONITORING PROCESSES IN A THERMAL PROCESSING CHAMBER

摘要

The invention relates inter alia to a method for monitoring processes in a thermal processing chamber by means of a camera, wherein by means of the one camera an image is recorded, wherein the one camera comprises a sensor, a control unit, and an energy store for supplying the one camera with electrical power. According to the invention the camera has a thermally insulating container, wherein the sensor, the control unit, and the energy store are arranged inside the thermally insulating container and wherein during the recording of the image the camera is located completely inside the processing chamber.