| 摘要 |
PURPOSE:To measure the quantity of exposure accurately, by arranging an illuminance sensor on a shutter. CONSTITUTION:A reticle 6 is illuminated with the light of a lamp 1 which is condensed by a converging lens 2, and its image is projected to a water 7 through a reduction lens 5. An illuminance sensor 8 which inputs an exposure intensity signal to an integration controlling circuit 4 is attached onto a shutter 6. Since the illuminance sensor 8 is arranged on a light path 9 while the shutter 6 is closed, the intensity of the illumination light is measured accurately. |
