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发明名称
FILM EXPOSURE DEVICE
摘要
申请公布号
JPH04156465(A)
申请公布日期
1992.05.28
申请号
JP19900279353
申请日期
1990.10.19
申请人
USHIO INC
发明人
TANAKA KAZUYA
分类号
G03F7/20;H01L21/027;H01L21/30;H05K3/00
主分类号
G03F7/20
代理机构
代理人
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