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发明名称
METHOD AND APPARATUS FOR VACUUM LEAK
摘要
申请公布号
JPH05330514(A)
申请公布日期
1993.12.14
申请号
JP19920158807
申请日期
1992.05.26
申请人
EBARA CORP
发明人
SHINOZUKA SHUHEI;ONO KOJI;MATSUMURA MASAO
分类号
B65B31/02;(IPC1-7):B65B31/02
主分类号
B65B31/02
代理机构
代理人
主权项
地址
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