| 摘要 |
PROBLEM TO BE SOLVED: To reduce capacitance and to simplify manufacturing by generating oscillation through the mutual elongation and contraction of two longitudinally parallel displacement generating parts. SOLUTION: In the case where a piezoelectric actuator is made from a piezoelectric material, where displacement generating parts 8, 9 are held between electrodes 4, 6 and 5, 7, in the thickness direction of which a polarization processing is carried out, and where a voltage is applied with the electrodes 6, 7 as minus electrodes or ground, and with the electrodes 4, 5 as plus electrodes, the polarization direction is in the directions of the arrow 10, 11. By utilizing the contraction or elongation in both directions, an oscillation movement can be generated. Being a single layer structure, it can reduce the capacitance, enabling the operation with a small capacity driving circuit, and improving the response characteristics through a small time constant. In addition, the thickness per layer can be increased, reducing risk such as polarization collapse, dielectric breakdown and migration.
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