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发明名称
PLASMA PROCESSING SYSTEMS AND METHOD THEREFOR
摘要
申请公布号
KR20020060969(A)
申请公布日期
2002.07.19
申请号
KR1020027006162
申请日期
2002.05.14
申请人
发明人
分类号
H01L21/3065
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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