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经营范围
发明名称
Ion implanter end station
摘要
申请公布号
US4975586(A)
申请公布日期
1990.12.04
申请号
US19890317224
申请日期
1989.02.28
申请人
EATON CORPORATION
发明人
RAY, ANDREW M.
分类号
H01J37/20;H01J37/317;H01L21/265;H01L21/687
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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