| 摘要 |
PURPOSE:To stably produce the discharged plasma in a discharge space regardless of the level of power supply frequency. CONSTITUTION:Assuming a capacitor alternately coupling feed electrodes 1, 2 with metallic pipes (metallic bodies) 13, 23 as a capacitance C, inductors 100 are inserted into the plasma device in parallel with the capacitor specifying the inductance C of the inductors 100 to be 1/{(2pif)<2>C} for cancelling the effect of the capacitance C. |
