| 摘要 |
PURPOSE:To simplify adjusting work by using a laser oscillator of unstable type, and providing a work position adjusting means for moving a workpiece along an optical axis of laser beam, in a laser marking device for making a printing pattern. CONSTITUTION:Laser beam L emitted from an excimer laser transmitter 1 of unstable type is condensed by a condenser lens 3 through a mask 2 of drilling holes of required printing pattern provided on an optical path, to perform making of the printing pattern by applying the beam onto a workpiece 4. By using this excimer laser oscillator 1 of unstable type, a degree of diffraction, when the laser beam L passes through the mask 2, is decreased. A work position adjusting means 8 is provided in a casing 7, to adjust a work position of the workpiece 4. By this constitution, the laser beam of permeating the mask is placed in a condition near a plane wave, and the work position of the workpiece can be adjusted without depending on an imaging formula, so that position adjusting the workpiece 4 is only required by the adjusting means 8 at the time of changing size of the printing pattern. |
