| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electro-optic robe which can scan at high-speed, and display stable detecting sensitivity and prevent damage due to mechanical contact even to a measured object being large in the irregularity of a printed wiring board or the like. SOLUTION: The conductive contact needle of a probe section is composed of a conductive body 7 bonded to an electro-optic crystal and a conductive thin film 8 fitted to the tip of the conductive body 7 using a conductive adhesive or a metallic bolt, and the conductive thin film 8 is formed by carrying out metal plating onto a heat-resistance high polymer thin film. The shape of the above thin film is angle-shapedly bent so that a metal plated side may be outside, and the conductive thin film is fitted to the conductive body in two side domains with a top side domain set at the tip. In addition, a top side direction is set so as to be perpendicular to the scanning direction of the probe section.</p> |
