| 摘要 |
PROBLEM TO BE SOLVED: To make an impedance matching device compact and to improve the responsiveness of the device to load impedance, such as the behavior of a plasma load, etc., and, at the same time, to prolong the service life of the device and to expand the degree of freedom of the device for setting. SOLUTION: Stubs 100, 200, and 300 are provided successively from a main coaxial pipe 10 at prescribed intervals in the axial direction of the pipe 10. Each stub is provided with a variable capacitance capacitor 20 and a conductive capacitor cover 40 covering the circumference of the capacitor 20. The movable electrode 26 of the capacitor 20 is directly driven by means of a driving motor 50 positioned on the outside of the cover 40. |
