发明名称 |
Ion beam irradiating apparatus including ion neutralizer |
摘要 |
In an ion beam irradiating apparatus, a specified ion beam is first deflected in a deflection direction perpendicular to an ion beam orbit by an ion beam deflector. The deflected ion beam is neutralized by a thermoelectron beam emitted from a filament of an ion neutralizer. An electrode is employed to control the supply of the thermoelectron beam to the deflected ion beam. Both the filament and control electrode elongated along the deflection direction surround the deflected ion beam traveled along the ion beam orbit.
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申请公布号 |
US4886971(A) |
申请公布日期 |
1989.12.12 |
申请号 |
US19880165957 |
申请日期 |
1988.03.09 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
MATSUMURA, YASUSHI;SHUHARA, AKIRA;SASAKI, SHIGEO;FUKUMOTO, KAZUMI;TAKEYA, HITOSHI |
分类号 |
G01Q30/20;G01Q70/14;G21K5/04;H01J37/02 |
主分类号 |
G01Q30/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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