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经营范围
发明名称
PRESSURE SENSOR
摘要
申请公布号
EP0146709(B1)
申请公布日期
1990.07.18
申请号
EP19840112321
申请日期
1984.10.12
申请人
HITACHI, LTD.
发明人
SHIMIZU, ISAO;HOYA, KAZUO
分类号
H01L29/84;G01L9/00
主分类号
H01L29/84
代理机构
代理人
主权项
地址
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