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发明名称
ION IMPLANTER
摘要
申请公布号
JPH10340696(A)
申请公布日期
1998.12.22
申请号
JP19970147369
申请日期
1997.06.05
申请人
SONY CORP
发明人
KAWASHIMA MASAHITO
分类号
C23C14/48;H01J27/08;H01J37/08;H01L21/265;(IPC1-7):H01J37/08
主分类号
C23C14/48
代理机构
代理人
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