发明名称 ELECTRONIC PART TESTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an inexpensive and durable electronic part testing device for accurately controlling the temperature of an electronic part even when the electronic part self-heats at the time of test, and for testing the electronic part at a desired testing temperature. SOLUTION: An IC chip part testing device is provided with a socket 20 having connecting terminals 21 with which an IC chip 22 to be tested is connected so as to be freely attachable and detachable, an absorbing nozzle 27 and an outer case 28 brought into contact with the upper face of the IC chip 22 so that the IC chip 22 can be brought into contact with the connecting material 21, and that the IC chip 22 can be pressurized to the direction of the connecting terminal 21, a temperature sensor 90 arranged at the socket 22 side for measuring the temperature of the upper face and the back face at the opposite side of the IC chip 22, and a cooling medium blowing channel 82 for blowing a cooling medium to the surrounding of the IC chip 22.
申请公布号 JP2000180502(A) 申请公布日期 2000.06.30
申请号 JP19980351357 申请日期 1998.12.10
申请人 ADVANTEST CORP 发明人 IGARASHI TOKUYUKI;FUKUMOTO KEIICHI
分类号 G01R31/26;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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