PIEZOELECTRIC/ELECTROSTRICTION ACTUATOR

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostriction actuator having good productivity and capable of readily and stably achieving a sealing property to the other member at a bonding face. SOLUTION: In a piezoelectric/electrostriction actuator 45, a part of a wall section of a pressurizing chamber formed in a base body can be deformed by a piezoelectric/electrostriction element. A spacer plate 70 having at least one window section 76, a closing plate 66 and a connection plate 68 having a first communication opening section 72 provided to a portion corresponding to the window section are laminated by a green sheet and are integrally baked to form a ceramic base body 44, thereby forming the base body. The piezoelectric/electrostriction element 78 is constituted of a piezoelectric/ electrostriction operating section consisting of electrodes 75, 77 formed on the outer face of the closing plate by a film forming method and piezoelectric/ electrostriction layer 79.