| 摘要 |
PROBLEM TO BE SOLVED: To provide a particle beam device suitable for observing, analyzing, working, etc., of insulators. SOLUTION: A sample 2 is placed on a conductor plate 12 of a sample stage which comprises the conductor plate 12, a thick insulator member 13, and a conductor plate 14, with the insulator member 13 sandwiched between the conductor plates 12 and 14. The conductor plate 14, being grounded, a negative input terminal of an operational amplifier 15 is connected to the conductor plate 12 while a positive input terminal is connected to the conductor plate 14. A control device 16 is provided which controls a filament heating power source FS of a neutralizing electron gun 4. The control device turns the filament heating power source FS on/off, controls an output voltage of the filament heating power source FS based on the signal from the operational amplifier 15, and controls a deflection power source RS.
|
