| 摘要 |
PROBLEM TO BE SOLVED: To improve the latitude of a plasma parameter in capacitive discharge. SOLUTION: In device which is provided, with a passive electrode 3 positioned separately from an active electrode 4, upon which a discharge maintaining voltage is impressed and generates a plasma through capacitive discharge for executing method of generating plasma, by capacitively distributed discharge using a multi-electrode barrier, multi-electrode magnetic barriers 11, from which lines of magnetic force are extended across a separating surface P which is parallel to the electrodes 3 and 4 are set up between the electrodes 3 and 4, so that the plasma and a diffusion area which are positioned in one of the side sections of the magnetic barriers 11 facing the electrodes 3 and 4 are generated and formed and highspeed electrons from the active electrode 4 may cause vibrations between the electrodes 3 and 4. |
