发明名称 PRODUCTION PROCESS OF NITRIDE CERAMIC SINTERED BODY
摘要 PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered body production process by which the brightness of an aluminum nitride sintered body can be reduced and the color of the sintered body can be blackened, without adding any metal element or the like to aluminum nitride. SOLUTION: This production process comprises adding an organic binder to a powdery nitride ceramic raw material and mixing them together to form a mixture; forming the mixture into a green body, subjecting the green body to thermal decomposition treatment in an inert atmosphere at >=300 deg.C to thermally decompose the binder, to carbonize it and to obtain a treated body having a 1,000-3,000 ppm carbon content, and subsequently, reducing the carbon content of the treated body while heating the body in an inert atmosphere under pressure to produce a nitride ceramic sintered body having a 500-2,000 ppm carbon content.
申请公布号 JP2001192271(A) 申请公布日期 2001.07.17
申请号 JP20000319854 申请日期 2000.10.19
申请人 IBIDEN CO LTD 发明人 ITO YASUTAKA
分类号 C04B35/58;H01L21/205;H01L21/302;H01L21/3065 主分类号 C04B35/58
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