| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary coating device capable of surely removing a coating liquid stuck to a cup, and a cleaning method of the rotary coating device. SOLUTION: The rotary coating device for applying the coating liquid on a substrate is provided with a rotary table 1 for placing the substrate, the cup 3 provided on the periphery of the rotary table and for preventing the scattering of the coating liquid and a cleaning mechanism for cleaning the inside surface of the cup and a blowing mechanism for blowing a gas on the sticking coating liquid to remove the coating liquid stuck to the cup. When the coating liquid is stuck to a hardly cleanable place (10) of the cup 3, the gas is blown on the sticking coating liquid 10 by the blowing mechanism to move the coating liquid to a lower position which can be easily cleaned by cleaning mechanism. |
