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发明名称
MANUFACTURE OF CMOS DEVICE HAVING SHORT GATE LENGTH
摘要
申请公布号
JPH0276255(A)
申请公布日期
1990.03.15
申请号
JP19890196482
申请日期
1989.07.28
申请人
SGS THOMSON MICROELETTRONICA SPA
发明人
KARURO BERUGONTSUOONI;TEICHIANA KABIOONI;JIYUSETSUPE PAORO KURISENTSUA
分类号
H01L27/092;H01L21/8238;H01L27/105
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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