发明名称 OPTICAL DEVICE OF ESPI SYSTEM FOR NON-DESTRUCTIVE INSPECTION
摘要 The apparatus comprises a module having a predetermined form, a rotatory douser mounted in the module, an aperture mounted in the interior of the module, a lens installed in the rear part of the aperture, an object beam for radiating in the front part of the module, a beam spirit for gathering reference beam, a charge coupled device for sensing an interference pattern of the reference beam and the object beam, and a signal processer for converting an image sensed in the charge coupled device into an electric signal and storing and subtracting each frame.
申请公布号 KR960000096(B1) 申请公布日期 1996.01.03
申请号 KR19910016403 申请日期 1991.09.19
申请人 LG ELECTRONICS CO., LTD. 发明人 LEE, HO - GYU
分类号 G01B9/02;(IPC1-7):G01B9/02 主分类号 G01B9/02
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