| 摘要 |
PROBLEM TO BE SOLVED: To easily achieve miniaturization at low cost, and to set a drive step to be smaller than the pattern pitch of a drive electrode by determining the drive voltage applied to the drive electrode by a voltage function with the relative movement position of a movable element as an argument. SOLUTION: On a stator 901, n-phase drive electrodes 902(1) to (n) are arranged at a uniform intervalλ. On a movable element 903, electrodes 905 to be driven are arranged at the intervalλ. The movable element 903 is supported, while the movable element can be moved merely in the horizontal direction for the stator 901, and an x-axis is defined along the movement direction. By application voltage generation functions 906(1) to (n), according to position and stiffness addresses p and q, voltages V1(p, q) to Vn(p, q) to be applied to the driving voltages 902(1) to (n) are generate. Since stable position and retention stiffness of the movable element 903 are determined by voltage applied to the drive electrodes 902(1) to (n), the argument of the application voltage generation functions 906(1) to (n) is set to the movement position of the movable element 903, thus achieving positioning with fine resolution.
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