发明名称 DEFECT CHECKING DEVICE
摘要 PROBLEM TO BE SOLVED: To enable rapid check of a defect without using a master image. SOLUTION: The defect-checking device obtains a mean luminance value of an image of a size decided based on a repeating pattern or an exposure shot size for a photographs image, and checks the detect based on the mean luminance value and previously decided inspection conditions. In a first defect check, the photographed image is converted in size, and the image is averaged in a prescribed size, and the defect is checked. In a second defect check, a mean shot image obtained by summing averaging the image at each shot is formed, four corners of the mean shot image are sliced into a prescribed size, and the defect is checked according to the mean luminance value of the diagonal positions. In a third defect check, the mean shot image is averaged in a prescribed size, the standard deviation of the luminance is calculated and the defect is checked.
申请公布号 JP2002014057(A) 申请公布日期 2002.01.18
申请号 JP20000203067 申请日期 2000.06.30
申请人 NIDEK CO LTD 发明人 YONEZAWA EIJI
分类号 G01B11/30;G01N21/956;G06T1/00;(IPC1-7):G01N21/956 主分类号 G01B11/30
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