发明名称 NONVOLATILE MEMORY DEVICE AND METHOD OF FORMING THE SAME
摘要 <p>A non volatile memory device and its manufacturing method are provided to implement high integration by using one unit having two cells, thereby reducing a chip size less than a general EEPROM. An isolation layer(102) having an active area(110) is formed on a semiconductor substrate. Memory cell units arranged with matrix type are formed on the semiconductor substrate. The each memory cell units comprise a common source region(112), a selective gate(123) filling the common source region, a first memory gate(137a) provided on the active area adjacent to one side of the selective gate, a second memory gate(137b) provided on the active area adjacent to the other side of the selective gate, and a first and second drain regions(114,115) on the active area.</p>
申请公布号 KR100762262(B1) 申请公布日期 2007.10.01
申请号 KR20060103058 申请日期 2006.10.23
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, SUNG CHUL
分类号 H01L27/115;H01L21/8247 主分类号 H01L27/115
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