| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical axis adjusting method having high degrees of freedom in adjustment, accurately adjusting an optical axis at a low cost, without requiring a skilled operator even when a noise is superimposed an evaluation on value of light. SOLUTION: The invention includes: an optical axis adjusting mechanism for adjusting the optical axis of the laser light by adjusting the coordinate value of the optical axis; a device for detecting the deviation of the laser light from the target irradiation position; and an adjusting device for searching the optimum value of the optical-axis coordinate based on a signal that estimates the deviation of the laser light, and then, outputting a control signal setting the coordinate value of the optical axis to the optical axis adjusting mechanism. A transition function P(t) is calculated, and it is determined whether a large-area search or a local search is performed based on the transition function P(t) in order to search the optimum value of the optical-axis coordinate, and the next searching point by the large-area search is decided or the next searching point by the local search is decided. When the positional deviation becomes within the prescribed value, the adjusting processing is ended. COPYRIGHT: (C)2008,JPO&INPIT |
