发明名称 POROUS SEMICONDUCTIVE FILM AND PROCESS FOR ITS PRODUCTION
摘要 The present invention provides a porous semiconductive structure, characterized in that the structure has an electrical conductivity of 5.10-8 S.cm-1 to 10 S.cm-1, and an activation energy of the electrical conductivity of 0.1 to 700 meV, and a solid fraction of 30 to 60% by volume, and a pore size of 1 nm to 500 nm, the solid fraction having at least partly crystalline doped constituents which are bonded to one another via sinter necks and have sizes of 5 nm to 500 nm and a spherical and/or ellipsoidal shape, which comprise the elements silicon, germanium or an alloy of these elements, and also a process for producing a porous semiconductive structure, characterized in that A. doped semimetal particles are obtained, and then B. a dispersion is obtained from the semimetal particles obtained after step A, and then C. a substrate is coated with the dispersion obtained after step B, and then D. the layer obtained after step C is treated by means of a solution of hydrogen fluoride in water, and then E. the layer obtained after step D is treated thermally to obtain a porous semiconductive structure.
申请公布号 US2009026458(A1) 申请公布日期 2009.01.29
申请号 US20080053369 申请日期 2008.03.21
申请人 EVONIK DEGUSSA GMBH 发明人 EBBERS ANDRE;TROCHA MARTIN;LECHNER ROBERT;BRANDT MARTIN S.;STUTZMANN MARTIN;WIGGERS HARTMUT
分类号 H01L29/04;H01L21/205 主分类号 H01L29/04
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