发明名称 OPTICAL INSPECTION SYSTEM AND METHOD INCLUDING ACCOUNTING FOR VARIATIONS OF OPTICAL PATH LENGTH WITHIN A SAMPLE
摘要 An illuminator/collector assembly (104) can deliver incident light (106) to a sample (102) and collect return light (112) returning from the sample (102). A sensor (114) can measure ray intensities as a function of ray position and ray angle for the collected return light (112). A ray selector can select a first subset of rays from the collected return light (112) at the sensor (114) that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light (112) that traverse within the sample (102) an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample (102), such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.
申请公布号 WO2016109355(A1) 申请公布日期 2016.07.07
申请号 WO2015US67463 申请日期 2015.12.22
申请人 BRIBBLA DYNAMICS LLC 发明人
分类号 G01N21/49;G01N21/17;G01N21/47 主分类号 G01N21/49
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