| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor element which detects vibration of a movable part with precision and a displacement element of high resonance frequency while excellent in responsiveness by increasing displacement amount of the movable part. SOLUTION: A piezoelectric/electrostriction device 1 comprises a drive part 3 for displacement with a piezoelectric/electrostriction element 2, a movable part 4 operated by the drive part 3, and a fix part 5 for supporting the drive part 3 and the movable part 4. The fix part 5 is connected to the movable part 4 through the drive part 3, with a hole part 8 comprised which is formed of inside walls of the drive part 3, the movable part 4, and the fix part 5. The drive part 3 comprises at least one pair of electrodes and at least two piezoelectric/electrostriction elements 2 comprising a piezoelectric/electrostriction film 2a on a pair of thin plate parts 6 and 7, facing each other. At least one end part of the piezoelectric/electrostriction element 2 and a piezoelectric/ electrostriction operation part 2' are provided on the fix part 5 while an end part of the piezoelectric/electrostriction operation part 2' at the other end part is provided on the thin plate part 7. |
