| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for feeding the vapor phase reactant from a source into a vapor phase reaction chamber. SOLUTION: In this method, a reactant as a liquid or a solid at an ambient temperature is vaporized at a vaporizing temperature from a reactant source, and the vaporized reactant is fed to a reaction chamber. The reactant source and the reaction chamber are arranged in individually exhaustible separate vessels. By this invention, new reaction chemical substance can be exchanged and changed without breaking a vacuum in the reaction chamber.
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