发明名称 RESIST PEELING LIQUID AND UTILIZATION OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a new resist peeling liquid which can peel resist at a low temperature and does not cause a corrosion of copper to a copper wiring material. SOLUTION: A copper wiring board is manufactured by using the resist peeling liquid containing a tetraalkylammonium hydroxide, alkanol amines, water, and a polyvalent carbonyl compound.
申请公布号 JP2002162754(A) 申请公布日期 2002.06.07
申请号 JP20000360497 申请日期 2000.11.28
申请人 NIPPON ZEON CO LTD 发明人 NAKAMURA MASAHIRO;MATSUOKA RIKITARO
分类号 G03F7/42;H01L21/027;(IPC1-7):G03F7/42 主分类号 G03F7/42
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