| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a step terrace structure on the surface of a zinc oxide single crystal substrate (ZnO wafer). <P>SOLUTION: The method of manufacturing a zinc oxide single crystal substrate includes a cutting step to cut a vertical plane to the C axis of a zinc oxide single crystal at a specified thickness so as to form it into an element formation plane, a shaping step to shape the element formation plane to a specified shape, a rough polishing step to polish the element formation plane, a heating step to apply a heat at least to the element formation plane, and a fine polishing step to polish the element formation plane by the chemical mechanical polishing method thereafter. <P>COPYRIGHT: (C)2007,JPO&INPIT |
