发明名称 LIQUID DROPLET SPRAYING APPARATUS AND METHOD FOR MANUFACTURING APPLIED OBJECT
摘要 A droplet injection device, and a manufacturing method of an applying body are provided to prevent a manufacturing defectiveness of the applying body, caused by a rupture of a surface layer for a droplet stuck to an applied object. A droplet injection device comprises an application unit, a keeping chamber(5a), an exhaust unit(5c), an adjustment unit(5d), and a control unit. The application unit is used to inject and apply a droplet to an applied object(2a). The keeping chamber is used to keep the applied object. The exhaust unit is used to exhaust gas of an inside for the keeping chamber. The adjustment unit is installed to adjust the exhaust quantity of the gas exhausted from the inside of the keeping chamber by the exhaust unit. The control unit is used to control the adjustment unit to change the exhaust quantity step by step. A manufacturing method of an applying body includes a step of changing the exhaust quantity of the gas exhausted to from the inside of the keeping chamber, step by step.
申请公布号 KR20070095797(A) 申请公布日期 2007.10.01
申请号 KR20070027385 申请日期 2007.03.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 ISHIHARA HARUHIKO;KINASE ATSUSHI
分类号 B41J2/00;B41J2/005;H01L21/66 主分类号 B41J2/00
代理机构 代理人
主权项
地址
您可能感兴趣的专利