| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a substrate board storage case for storing substrate boards such as mask-blanks or photo-masks, which is capable of preventing deposition of dust to the stored substrate boards. <P>SOLUTION: The substrate board storage case 1 is constituted of a case body 2 and a case lid body 3, with the case body 2 having, at its opening edge, a thin-walled guide edge 22 formed that is engaged with the case lid body 3. A negative pressure relieving means 10 is installed at the thin-walled guide edge 22, and a dust-deterrent means 11, formed of a material whose stiffness is different from that of the case body 2, on the inside of the opening of the case lid body 3. The negative pressure relieving means 10 is an air-vent. The dust-deterrent means 11 is a hard-quality tape formed of a material whose stiffness is different from that of the case body 2. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
